Towards achieving nanofinish on silicon (Si) wafer by μ-wire electro-discharge machining
نویسندگان
چکیده
منابع مشابه
Using Multi-Objective Optimization to Design Parameters in Electro-Discharge Machining by Wire
Multi-objective optimization Genetic Algorithms Robust Design The following paper describes the main objective to follow the methodology used and proposed to obtain the optimal values of WEDM process operation on the machine Robofil 310 by robust parameter design (RPD) of Dr. G. Taguichi [TAGUCHI, G. 1993], through controllable factors which result in more inferences regarding the problem to no...
متن کاملUltrasonic Vibration Assisted Electro-Discharge Machining
An ultrasonic vibration has been superposed on the normal electrode movement to increase the flushing effect during a micro electro-discharge machining (EDM) process. A systematic study on the effects of ultrasonic vibration on the EDM performance for fabricating microholes in Nitinol has been completed. The introduction of ultrasonic vibration to the microEDM process has more than 60 times inc...
متن کاملMicro-Electro-Discharge Machining Technologies for MEMS
Advances in micromachining techniques have led to the evolution of micro-electromechanical systems (MEMS). These techniques are typically based on semiconductor manufacturing processes, which offer various advantages such as batch manufacturing of miniaturized devices and monolithic integration of microelectronics with the devices. Surface micromachining has been used to construct complex micro...
متن کاملIn Situ Micro Gripper Shaping by Electro Discharge Machining
Bio technologies, electronic components, MEMS or watch industry require handling and positioning of ever smaller micro-parts (ten to hundred μm size). Several tools used for such tasks, called micro-grippers have been developed based on different catching and releasing principles. Vacuum grippers are mainly used in the macro world and have been successfully downsized to fulfill micro-world appl...
متن کاملAchieving precision in high density batch mode micro-electro-discharge machining
This paper reports a parametric study of batch mode micro-electro-discharge machining (μEDM) of high density features in stainless steel. Lithographically fabricated copper tools with single cross, parallel line and 8 × 8 circle/square array features of 5–100 μm width and 5–75 μm spacing were used to quantify trends in machining tolerance and the impact of debris accumulation. As the tool featu...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: The International Journal of Advanced Manufacturing Technology
سال: 2018
ISSN: 0268-3768,1433-3015
DOI: 10.1007/s00170-018-2692-4